材料(符号)
|
纯度
|
成型工艺*
|
最大尺寸
|
形状
|
|
铝(Al)
|
3N、4N、5N
|
A
|
1000x300mm
|
按照用户要求加工各种圆片状靶材、圆锥状靶材、圆棒状靶材、方形板状靶材、方形片状靶材、S枪靶、多弧靶以及其他不规则形状靶材。
按照用户要求加工各种圆片状靶材、圆锥状靶材、圆棒状靶材、方形板状靶材、方形片状靶材、S枪靶、多弧靶以及其他不规则形状靶材。
|
|
铝硅(Al-Si)合金
|
4N~4N5
|
A
|
1000x300mm
|
|
铝铜(Al-Cu)合金
|
4N~4N5
|
A
|
1000x300mm
|
|
铝硅铜(Al-Si-Cu)合金
|
4N~4N5
|
A
|
1000x300mm
|
|
铝钛(Al-Ti)合金
|
4N
|
A
|
1000x300mm
|
|
铝镁(Al-Mg)合金
|
3N5~4N
|
A
|
350x200mm
|
|
铝镁硅(Al-Mg-Si)合金
|
3N5~4N
|
A
|
350x200mm
|
|
银(Ag)
|
4N
|
A
|
1000x300mm
|
|
银铜(Ag-Cu)
|
4N
|
A
|
1000x300mm
|
|
银铜(Ag-Cu)
|
4N
|
A
|
1000x300mm
|
|
银钯(Ag-Pd)
|
4N
|
A
|
800x300mm
|
|
金(Au)
|
4N
|
A
|
800x300mm
|
|
金锗(Au-Ge)合金
|
4N
|
A
|
Φ300mm
|
|
金锗镍(Au-Ge-Ni)合金
|
4N
|
A
|
Φ300mm
|
|
铋(Bi)
|
4N
|
A
|
400x200mm
|
|
石墨(C)
|
3N
|
B
|
600x300mm
|
|
镉(Cd)
|
4N
|
A
|
800x300mm
|
|
钴(Co)
|
3N
|
A
|
800x300mm
|
|
钴铬(Co-Cr)合金
|
3N
|
A
|
400x300mm
|
|
钴镍(Co-Ni)合金
|
3N
|
A
|
400x300mm
|
|
钴铁(Co-Fe)合金
|
3N
|
A
|
400x300mm
|
|
钴铁硼(Co-Fe-B)合金
|
3N
|
B
|
Φ101.6mm
|
|
钴铁铜(Co-Fe-Cu)合金
|
3N
|
A
|
400x300mm
|
|
铬(Cr)
|
2N5、3N、3N5
|
C
|
500x200mm
|
|
铬硅(Cr-Si)合金
|
3N
|
B
|
Φ101.6mm
|
|
铜(Cu)
|
4N
|
A
|
1000x300mm
|
|
铜锰(Cu-Mn) 合金
|
3N~3N5
|
A、 B
|
400x200mm
|
|
铜钴(Cu-Co) 合金
|
3N~3N5
|
A
|
400x300mm
|
|
铜镍(Cu-Ni) 合金
|
3N~3N5
|
A
|
400x300mm
|
|
铜铝(Cu-Al) 合金
|
3N~4N
|
A
|
400x300mm
|
|
铜镓(Cu-Ga) 合金
|
3N5~4N
|
A
|
400x300mm
|
|
铜铟镓(Cu-In-Ga) 合金
|
3N5~4N
|
A
|
400x300mm
|
|
铁(Fe)
|
2N5、3N、4N
|
A
|
1000x300mm
|
|
铁锰(Fe-Mn)合金
|
2N5
|
A、 B
|
400x200mm
|
|
铁镍(Fe - Ni)合金
|
2N5~3N
|
A
|
1000x300mm
|
|
铁钴硼硅(FeCoBSi)合金
|
2N5
|
B
|
Φ101.6mm
|
|
锗(Ge)
|
4N
|
C
|
Φ101.6mm
|
|
铪(Hf)
|
3N
|
A
|
500x200mm
|
|
铟(In)
|
4N
|
A
|
800x300mm
|
|
铟锡(In-Sn)合金
|
3N5~4N
|
C
|
800x300mm
|
|
铟锑(In-Sb)合金
|
3N5~4N
|
C
|
Φ100mm
|
|
铱(Ir)
|
3N
|
A
|
300x200mm
|
|
镁(Mg)
|
3N~4N
|
A
|
800x300mm
|
|
锰(Mn)
|
2N
|
B
|
Φ30mm
|
|
钼(Mo)
|
3N5
|
B
|
500x300mm
|
|
镍(Ni)
|
2N5、3N5、4N
|
A
|
1000x300mm
|
|
镍铬(Ni-Cr)合金
|
3N、3N5
|
A
|
1000x300mm
|
|
镍锰(Ni-Mn)合金
|
2N5~3N
|
A、B
|
400x200mm
|
|
镍铬硅(Ni-Cr-Si)合金
|
3N~3N5
|
A、B
|
400x200mm
|
|
镍铬铁(Ni-Cr-Fe)合金
|
3N~3N5
|
A
|
500x300mm
|
|
镍铁(Ni-Fe)合金
|
3N、3N5
|
A
|
600x300mm
|
|
镍钒(Ni-V)合金
|
3N、3N5
|
A
|
1000x300mm
|
|
镍铂(Ni-Pt)合金
|
3N~3N5
|
A
|
400x200mm
|
|
镍铝(Ni-Al)合金
|
3N~4N
|
A、B
|
400x200mm
|
|
铅(Pb)
|
3N、4N
|
A
|
800x300mm
|
|
钯(Pd)
|
3N
|
A
|
500x300mm
|
|
铂(Pt)
|
3N、3N5
|
A
|
500x300mm
|
|
铑(Rh)
|
3N
|
B
|
Φ101.6mm
|
|
钌(Ru)
|
3N5
|
B
|
Φ101.6mm
|
|
硅(Si)
|
5N
|
A
|
Φ101.6mm
|
|
硅铝(Si-Al) 合金
|
4N~4N5
|
A
|
400x200mm
|
|
锡(Sn)
|
3N5、5N
|
A
|
1000x300mm
|
|
钽(Ta)
|
3N~3N5
|
A
|
1000x300mm
|
|
钛(Ti)
|
2N5、2N7
|
A
|
1000x300mm
|
|
钛硅(Ti-Si)合金
|
2N5
|
B
|
Φ101.6mm
|
|
钛铝(Ti-Al)合金
|
2N5
|
C
|
400x200mm
|
|
钛铝钇(Ti-Al-Y)合金
|
2N5
|
C
|
400x200mm
|
|
钛镍(Ti-Ni)合金
|
2N5~3N
|
A
|
500x300mm
|
|
钛锆(Ti-Zr)合金
|
2N~2N5
|
A
|
300x300mm
|
|
钒(V)
|
2N5~3N
|
A
|
500x300mm
|
|
钨(W)
|
3N5
|
B
|
500x300mm
|
|
钨硅(W-Si)合金
|
2N5
|
B
|
Φ101.6mm
|
|
钨钛(W-Ti)合金
|
2N5
|
B
|
Φ101.6mm
|
|
锌(Zn)
|
3N、4N
|
A
|
800x300mm
|
|
锌铝(Zn-Al) 合金
|
3N~3N5
|
A
|
800x300mm
|
|
锆(Zr)
|
2N4、2N8
|
A
|
300x300mm
|
|
锆钇(Zr-Y)合金
|
2N
|
A
|
300x300mm
|
| *上表中加工方法一栏： A-熔炼 B-特殊烧结 C-特殊熔炼
|
|
